IGBT Laser Annealing Equipment
The laser processing system UPLA-200 is an advanced industrial solution for semiconductor industry.- Product introduction
- Product features
- Technical parameters
- Reference picture
- The laser processing system UPLA-200 is an advanced industrial solution for semiconductor industry. The modular system comprises a laser processing module for IGBT laser annealing and an integrated handling module for wafers. It is an attractive enabler for process development and final industrial product. The advanced annealing processing technology provides excellent processing performance by our know-how technology. The integrated wafer handling technology provides precise, reliable and efficient wafer transportation. The annealing processing performance and the throughput is well balanced by the advanced UPLA-200.
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