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Electrostatic chucks
E-chuck is a kind of clean chip’s carrier used in vacuum or plasma environment. The applied electrostatic chucking technology is a superior alternative to mechanical or vacuum clamping, which widely used in semiconductor or optical field.-
Automated handling E-chuck
Automated handling E-chuck
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Wafer Hand
Wafer Hand
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Optical Detection Stage
Optical Detection Stage
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Electrostatic Carrier Belt
Electrostatic Carrier Belt
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